5AM2-C-5 転がり機構を用いた両面エレクトレット型静電発電素子(5AM2-C OS4 電池レス・デバイスのためのエネルギーハーベストの展開)

抄録

This paper describes electrostatic energy harvester employing electrets with ball bearing system. In this device, a electret plate was supported using micro balls and was embedded between electrode plates. Electret was fabricated on the both sides of the electret plate. When external force is applied to the device, electret plate can laterally vibrate due to rolling of the micro ball, and electric energy is outputted to external circuit. As a result, output power spectrum was broad from DC to 30 Hz, and maximum power of 12.3 nW was generated at 20 Hz. This value was 3.3 times higher than that of conventional single side electret generators.