20pm3-PM022 金ナノ粒子を利用したレーザ微細加工技術の研究

抄録

An application of laser microfabrication technique of a polymer film using absorbance of Au nanoparticles for realizing nano-microstructure was proposed. The polymer films are made of ethylcellulose in which Au nanoparticles was dispersed. Since the absorption spectrum which influences a laser processing ability depends on size of Au nanoparticle in polymer, different size of Au nanoparticles were prepared using liquid-phase reduction method and size control technique. Au nanoparticle dispersed ethylcellulose films with six size of Au nanoparticles was processed by Nd:YVO_4-SHG laser (CW, wavelength of 532nm). In this paper, an optimal Au nanoparticle size and laser processing condition for microfabrication was demonstrated for realizing a fine micropattern on the film.