22am2-E5 パッケージ後に荷電されたMEMSエレクトレット環境振動発電器の試作
詳細
A MEMS electret vibration energy harvester with comb drive is developed, Soft X-ray photoionization is used to charge electret after packaging, by which charge decay during the thermal cycle of the packaging process can be avoided. With an early prototype in package, vertical electret on the comb drives has been successfully charged with soft X-ray photoionization, and up to 3.5 μW has been obtained at 563 Hz and 2 g oscillation.
