20pm3-F-3 固体イオンエレクトレットを形成したSiO_2薄膜に関する帯電メカニズムの検証

抄録

This paper reports that a charging mechanism of the electret film made of Potassium ion-doped SiO_2 film. First, we obtained an experimental result that the charging is only occurred in positively biased electrode but not occurred in negatively side process and its charging polarity is negative. Following the result, we supposed that the origin of the charging in the electret film is oxygen defect in the SiO_2 which arises as a result of Potassium ions moving. In order to ensure the reliability of the charging mechanism, three different samples were analyzed with Secondary Ion Mass Spectrometry. First sample is positively biased electrode, Second sample is negatively biased electrode and Third sample is not done anything. From the result, Potassium ion concentration with respect to depth and charging voltage was indicated.