The Proceedings of the Symposium on Micro-Nano Science and Technology
Online ISSN : 2432-9495
2015.7
Session ID : 30am2-PN-34
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30am2-PN-34 Magnetically controllable 3D microstructures fabricated using femtosecond laser
Katsuhiro SuzukiHiroaki Nishiyama
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Abstract
Magnetic microbeads were introduced into 3D microstructures fabricated using femtosecond laser multi-photon polymerization. Femtosecond laser multi-photon polymerization is a powerful tool for 3D micro-/nanodevices. However, it is rather difficult to obtain hybrid functional structures, which consist of polymeric structures with different materials such as magnetic or metal materials. We proposed a novel approach for the fabrication of 3D microstructures with magnetic beads. In this process, the beads can be introduced to desired regions in the structures. Even after vibrations to the structures, it was confirmed that the beads were firmly kept to be stable. "Doping" technique of functional materials to 3D microstructures offers opportunities for highly integrated functional devices.
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© 2015 The Japan Society of Mechanical Engineers
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