An SiO_2 electret with nano/micro scaled texture was developed to enhance generation power of our previously developed electrostatic vibration energy harvester. The texture on SiO_2 was formed by lithography and wet etching process. The width/pitch of the texture is 0.2 μm / 0.6 μm or 1.0 μm / 2.0 μm. Both initial value and stability of surface potential of textured electret was better than that of control sample. It was also found that the smaller texture enhance these properties. On the other hand, the stiction force using textured electret was smaller than that using control electret.
