30am2-PN-54 Challenge of High-Throughput Method by using a Thermal Microscope

Abstract

Thermoelectric material is a capable to convert heat into electricity. Thermal microscope is a useful device to measure the local thermal properties of materials with many compositional distribution. Although, it is necessary to sputter a thin metal film on the surface of the sample for the measurement, it is difficult to make film with uniform thickness on large sample. In this study, the distribution of thickness on the sample was evaluated by using cover glass sputtering. The effect of sample thickness is successfully calibrated. Thermal effusivity of thermoelectric materials prepared by high-throughput method was evaluated with thermal microscope.