抄録
A novel diaphragm design was proposed for enabling wide-range pressure sensing platform using a universal strain sensor chip. A pressure sensor consists of a metal diaphragm designed to meet sensor specifications, and the sensor chip attached on the diaphragm. The sensor chip has four piezoresistive gauges concentrated on the center, and it outputs voltage depending on strain difference between x and y axes. This concentrated gauge design gives the diaphragm diversity in its design. Two diaphragm designs, rectangle type and hour-glass type, were proposed to enable this concept by giving large XY strain difference at the center of the diaphragm. It was verified that a sufficient sensitivity could be obtained with the rectangle type even with thicker diaphragm than the conventional circle one, and the sensitivity was almost doubled with the hour-glass type. High robustness against assembling position error of the sensor chip was also verified.
