Abstract
In recent years, 3D printers have been utilized in many fields. The size of 3D printed object is ranging from several micrometers to several meters. In particular, microstereolithography makes it possible to produce 3D micro objects whose size is less than a few centimeters. In this process, photopolymer is selectively polymerized by scanning a laser beam. To produce precise 3D micro objects, exposure conditions such as laser power and scanning speed should be optimized to reduce over exposure or under exposure. Inadequate optimization of the exposure condition causes to shape errors. To evaluate the shape errors, we have developed a 3D shape measurement system suitable for evaluating transparent 3D micro objects produced by microstereolithography. In experiments, we demonstrated that micropillars whose diameters are on the order of several hundred micrometers could be observed by our 3D shape measurement system.
