マイクロ・ナノ工学シンポジウム
Online ISSN : 2432-9495
セッションID: PN-138
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マイクロタービンを実装したファイバー型マイクロツールの開発
*丸尾 昭二久保田 将椿 大志
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In this study, we have developed a metalized spinning-top microturbine driven by an ultralow-power laser beam. This microturbine was supported by the upper and bottom bearings. The metalized microturbine was fabricated by the combination of two-photon microfabrication and electroless copper plating. In experiments, we succeeded in driving the microturbine by focusing the laser beam on the blades of a microturbine. In order to drive the microturbine at a higher velocity, we used the flow around a laser-induced microbubble. As a result, the microturbine could be rotated at a speed of 3500 rpm. Finally, we demonstrated the driving of spinning-top microturbine attached on an optical fiber tip. Such optically driven metalized micromachines will be useful for functional lab-on-a-chip devices and microtools for biological research.
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