検出波長を動的に変更可能なプラズモニック光検出器の分光用途への応用可能性

抄録

This paper reports a reconfigurable plasmonic photodetector with a micro electro mechanical system (MEMS) angular modulator for application of miniaturization of a near-infrared spectrometer. The structure of this research has a plasmonic gold diffraction grating capable of detecting the corresponding wavelength at a specific incident angle on an n-type Si cantilever. We confirmed that the peak of the photocurrent signal from the fabricated device occurred at different incidence angles depending on the wavelength. To demonstrate the applicability of the photodetector, spectroscopy was performed from the photocurrent signals from the device. The spectra calculated from the signals was consistent with the spectra from the commercial spectrometer.