Abstract
For the precision machinery the mechanical property is one of the very important factors to determine the precision and function of itself; but it is difficult to measure the response property as to micro-vibration. To improve the accuracy of micro-vibration generation and the testing frequency band-width, the authers developed a new hybrid testing device with piezoelectric and pneumatic actuators. The device can generate any required vibration waves precisely while deliminate the micro-vibration from the ground with actuators capable of acting from low to high frequencies. The properly designed digital controller is used to form both feedback and feedforward control at high speed and high resolution.
