Abstract
Recently, the superfine devices in semiconductor manufacturing fields have been rapidly developing. As the IC patterns processed by them is getting finer, the effect of microvibration is more. Nowadays, in addition to making vibration environment as low aw possible, the superfine devices are needed to clarify the characteristics to microvibration. The purpose of this study is to develop the microvibration simulator which has stability robustness and good attenuation performance with H_∞ controller, furthermore applying feedforward control, to improve the follow-up performance to desired values.
