Abstract
The aim of this paper is to realize a sliding mode control system using H_∞ robust hyperplane based on fuzzy model for AMB system with gyroscopic rotation. A fuzzy model of AMB system is built from the input and output data of the actual turbo-molecular pump by using fuzzy neural network. The sliding mode controller has a switch hyperplane using H_∞ control theory which can suppress spillover phenomena. We did the super high-speed operation test of the actual turbo-molecular pump by using that controller and obtained good results.