抄録
This paper proposes a control system to realize a large-scale of flexible Isolation table. In the case of large-size and lightweight isolation table, multiple elastic vibration modes appear on the table. To deal with this problem, we identify a 5-DOF lumped model of the table by using the reduced order physical modeling method and construct an experimental flexible isolation system. The LQ control theory is applied to the identified model and a feedback controller is introduced. Moreover, a feed-forward controller for multi input multi output system is added in order to obtain the higher isolation performance. Thus, two-degree-of-freedom controller combined LQ with feed-forward controllers is designed. The performance of the controller is confirmed through control experiments and the effectiveness of the presented control system design procedure is shown.
