D102 非線形ロパスト制御による原子間力顕微鏡のステージ位置制御系の性能改善(制御技術)

抄録

In this paper, we propose a new design method for stage positioning control of atomic force microscope (AFM). Our controller contains switching action to cope with discontinuous disturbance that is not satisfied matching condition. Since the control input signal is employed to draw a sample surface shape in the AFM system, we introduce a smoothing method in our control law to reduce undesired high-frequency switching signals.