Abstract
The method to suppress large displacement vibration for a pneumatic isolation table is considered in the present paper. External force can be added to the pneumatic isolation table by increasing or decreasing the air pressure in air springs in this system. In order to suppress large displacement vibration, it is need to switch the control input instantly. Therefore, the plant includes an on-off action and an input time-delay as the control input. It is known that the stabilization of this kind of system is difficult using conventional linear feedback controls such as the optimal regulator. Thus, a method is proposed which ensure stability by changing input based on quantization error evaluation which arises from on-off drive. Furthermore, the proposed method is applied to a pneumatic isolation table and the performances are verified by numerical simulations and experiments.
