抄録
In this paper, a synchronization error suppression control is proposed for twin-drive table system. A synchronization error between each axis cause a serious vibration and disturb high-precision and fast response. Some suppression methods to reject a synchronization error was proposed. For example, the torque reference was modified by using synchronization position errors and velocity errors, and the torque reference was modified by using synchronization position errors, velocity errors and difference in torque reference values, are proposed in the past studies. It is confirmed that these conventional methods have an effect of synchronization error suppression. However, a mechanical vibration of the table drive system could not be suppressed by these methods. Therefore, the synchronization error suppression control method using a disturbance observer is proposed. The disturbance observer is full-ordered model and those gains are tuned by three equal roots method. The observer is added to PID control of each axis with suppression compensation methods. It is verified that the simulations and experiments show the effectiveness of the proposed method.
