Abstract
This paper deals with the control system design for active isolation table. If elastic loads are put on the isolation table, vibration modes of the table are changed. Therefore, the controllers for the active isolation table should be designed taking account of elastic loads. According to this fact, a dynamical model must be identified that takes the dynamics of elastic loads into consideration for such controllers. In this research, an experimental active isolation table with an elastic load is built. Its dynamical model is identified by using experimental modal analysis or FEM analysis. Three controllers are designed by using the model according to sub-optimal control theory, absolute velocity feed-back control theory and feed-forward control theory, respectively Property of the obtained controller's are qualified through computer simulations and control experiments.
