Abstract
The control performance of the FPD (Flat Panel Display) exposure apparatus plays an important role to improve the performance and productivity of the liquid crystal panel, and the stage in the apparatus must be control with high speed and high precision. However, the control performance is deteriorated due to the influence of a coupling effect between axes when the stage is moved at a high speed. This paper proposes a design method taking account of the interference between axes using a gain scheduled LQ. The effectiveness of the proposed method is verified by simulations.
