抄録
The macroscopic and microscopic deformation was investigated on Pt_<48.75>Pd_<9.75>Cu_<19.5>P_<22> amorphous alloy, the material exhibits a Newtonian viscouss flow in the supercooled liquid temperature range above 503K (Tg:glass transition temperature). The microformability is evaluated by the geometrical transferability of the die shape to the material. V-grooved micro dies of (100)Si were fabricated by an electron beam lithography-nanometers to 1 micrometer. After the forming, the transferred shape of the material is measured with AFM. As a result, the material exhibits superior formability on nanameter scale and may be applied to micro/nano-forming of nano-devices.
