415 マイクロ鋳造装置の試作と金属ガラスの加工特性(OS 溶融加工(2))

抄録

We developed a small casting machine for metallic glasses on the concept of microfactory. The apparatus consists of 0.3mm diameter-nozzle at an end of 2mm-dia silica tube, cylindrical furnace for heating Pt-based metallic glass in the glass tube, pressure Ar-gas for spouting of molten metal to a microdie. Micro-die is cooled in a vacuum chamber with Peltie-cooling module. Die casting was carried out by using micro-gear-die of 50 and 10μm in module and good formability was observed. We performed to cast with 2μm width-V-grooved (100)Si die, and observed submicron-roughness on the surface of the specimen and confirmed the possibility of ultra-precision casting.