抄録
Mechanical properties, such as hardness, adhesion strength and friction coefficient of Y_2O_3 coating processed on various substrates were evaluated. A micro indentation apparatus was applied to the hardness and the adhesion strength measurements of the coating. The friction coefficient was evaluated using a ball on flat type testing apparatus in air atmosphere and in dry condition with relatively lower sliding speed. Results showed that the adhesion strength was different depending on the substrate materials and that the friction coefficient of the Y_2O_3 thin coating was relatively small.
