This paper presents a stabilization technique for semivariogram parameter identification process used in the Kriging method. In this study, the empirical semivariogram-based parameter identification process is employed. In this case, numerical instability of the parameter identification process is sometimes observed, and a stabilization technique for this problem is proposed. In this paper, outline of the Kriging estimation and instability of the parameter identification process are explained at first. Next, the proposed method is described. With some numerical examples, effectiveness of the proposed method is illustrated.