Cells with solid oxide electrolyte can be applied for a hydrogen generator, namely Solid Oxide Electrolysis Cells SOECs (SOECs) In this study, we carried out the cycle analysis foi SOEC systems following two steps Firstly, SOEC system models with H2 production capacity of 300 Nm3/h were constructed Secondly, system efficiency was calculated based on heat and mass balance from a viewpoint of "exergy" We treated two cases of SOEC systems which have different operating temperatures, 850°C and 650℃ As a result, several factors which decide property of exergy efficiency were obtained. At load rate with endothermic reaction, the balance of temperature of heat source and stack performance is primary factor for exergy efficiency On the other side, the heat loss is more important factor at load rate with exothermic reaction Therefore it is important to select the suitable system considering the operating conditions such as load range of SOEC systems