Abstract
The control of fluid flow in the micro channel is becoming an important technique in the development of the micro device for the vaio technology. This research focuses on the on-chip controller of a flow in a micro channel, and on the development of a control element. In this presentation, the characteristic of three kinds of sensors that have possibility of an on-chip fabrication are reported. The fabricated micro channel consists of the micro venturi, the mass flow meter, and the hot wire. The characteristic was investigated in the various conditions of the flow velocity and the several conditions of the channels.
