Abstract
Recent advances in micro actuators for thermofluid control are reviewed throughout the IEEE international conferences on micro electro mechanical systems from 1998 to 2002. The important contributions are discussed in terms of -basic phenomena, -micropumps or microvalves, -micromixers, -micro thermofluid machines or power MEMS, -integrated systems, and -boundary-layer control using micro perturbations. The author stresses that, in this field, remarkable progresses have been made and there are plenty of challenging works which lead to new possibilities for the thermofluid dynamics.
