Abstract
This paper examines dynamic characteristics of a feed drive system with the nonlinear spring behavior. The dynamic characteristics during the microscopic motion can be described with the Coulomb friction term in the range beyond 1OOμm, and described by the nonlinear spring behavior in the range less than 100μm. In this study, comparing experiment results with simulation results of the driving torque for sinusoidal wave input of microscopic displacement, it is clarified that the nonlinear spring behavior can be represented by the model taken the hysteresis into account.
