Abstract
This paper describes a transparent MEMS device that was designed to detect both the optical and electrophysiological signals of the luciferin-luciferase reaction. By using microelectromechanical systems (MEMS) technologies, we have studied and developed "Micro Channel Array" (MCA) integrated with suction holes and electrodes as planar patch-clamp devices. A transparent MEMS device was developed as an advanced MCA. Developed transparent MEMS device employs SU-8-based MCA structure for simultaneous multipoint detection of optical and electrophysiological signals. In this study, we tested the newly developed device using the mPerl-luc slice culture, which has circadian rhythms, and is a typical example of cells in which a luciferin-luciferase reaction occurs. We could measure the optical and electrophysiological signals of the mPerl-luc slice culture. Herein we describe the experimental results of this study, and describe the design and fabrication of the transparent MEMS device with MCA.