Abstract
A replication technique of three-dimensional (3-D) microstructures produced by two-photon microstereolithography have been developed. In this technique, 3-D master model produced by two-photon microstereolithography is replicated using a PDMS mold. By adding thin membranes to a master model with closed loops, complex 3-D microstructures including as a table model and a spiral model can be reproduced. In addition, to replicate microstructures less than 10 micrometers, supercritical drying process was introduced. Since the surface tension while drying the microstructures can be removed, fragile 3-D master models with thin membranes were successfully fabricated. The membrane-assisted 3-D soft-molding technique enables to reproduce even freely movable microstructures. This 3-D microtransfer molding technique will be applied to mass production of micromachines for biochip technology.
