Abstract
Development of fabrication technology made it feasible to fabricate micro order structures. Those technologies include machining, MEMS (Micro Electro Mechanical System) and laser fabrication. In micro-world, assembly becomes especially a crucial problem. We have developed an easy and fast assembly process of microparts called STAMP (Stacked Microassembly Process). In this process, three-dimensional structural object is fabricated by stacking up two-dimensional layers and micro-structures are cut apart after all the assembly is completed. Here, as an example, we have fabricated a model of stag beetle. Two-dimensional layer parts are fabricated by SU-8 photolithography and electroplating. Stacked parts are bolted together using micro-rivets.
