1A1-B20 Development of Sensor Probe for Deep Hole Measurements Using Selfoc Lens and PSD

Abstract

This paper proposes optical measurements of inner diameter and inclination angle of deep hole. The light of an infrared LD is emitted from a slender probe to the surface of an object and the scattered spot light is focused on 2-dimensional PSD (position sensitive detector) through a long Selfoc rod lens. It was confirmed that the accuracy of the measured distance between the probe and the object wall was less than 20 μm.