Abstract
Flexible and highly-sensitive capacitive sensors that are capable of detecting pressure distribution on curved surfaces are on demand these days. Using solid dielectric material could deteriorate the sensors flexibility, while using air as the dielectric might compromise the sensors sensitivity. We propose a distributed capacitive sensor encapsulated in liquid that has high permittivity constant, namely, DI water and glycerin, as the dielectric. This design can increase the sensitivity while maintaining the flexibility of the sensors. The proposed sensor was micro-fabricated and proven to maintain its flexibility while being deformed. The sensitivity enhancement of the device is to be demonstrated by comparing some characteristics of the devices; between that with and without liquid encapsulated. The experiment results showed that the devices with liquids encapsulated were more sensitive when higher pressure is applied, and amplification ratios of the devices with DI water and glycerin increased ±7 and ±3.5 times respectively, as compared to the device without the liquid encapsulated.
