Abstract
In this study, we intend to develop three-dimensional (3-D) piezoelectric micro power generation devices using a 3-D ceramics molding process based on microstereolithography. In this method, High concentration slurry of ceramics nanoparticles is introduced into 3-D polymeric mold fabricated by microstereolithography, and then the polymeric mold is thermally decomposed. After sintering of green body, any 3-D ceramics microstructures can be produced. In preliminary experiments, we fabricated piezoelectric cantilevers using slurry of BaTiO3 nanoparticles. After polarization treatment of the piezoelectric cantilevers, we confirmed that they could generate output voltage due to apply pressure. As the first trial, we fabricated a sintered body of a helically-curved power generation device. We will evaluate the performance of the device in experiments.
