Abstract
We proposed a novel electrostatic linear actuator using fringe electrical field and a trenched ferroelectric. This actuator can be driven at low applied voltage due to using an electret. A comb-shaped polymer electret with grounded base electrode and a comb-shaped counter electrode are interdigitally fabricated on an insulating substrate. The driven voltage is applied to the counter electrode. Between electret and electrode, fringe electrical field is generated and the electrostatic force is applied to the trenched ferroelectric. The narrow gap such as several tens micrometer is achieved due to support the ferroelectric by the linear rails with ball bearings (200 μm in diameter). The maximum force of actuator was 0.02 mN/mm^2 at 300 V applied.
