Abstract
A flexible vacuum gripper with an autonomous switchable valve is proposed. These valves are normally close and opened when contacted with the object. Since the gripper is made of flexible polymer such as Polydimethylsiloxan (PDMS), this gripper can hold a free-form surface. As the valves become small, the gripper can hold object with high step and curvature. The gripper with 64 valves was fabricated using Micro Electro Mechanical Systems (MEMS) technology. The gripper size was 100 mm^2 and absorption area is 11 mm^2. The experimental average vacuum absorption force was 0.42 N (43 gf) when the gage pressure was -80 kPa.
