The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec)
Online ISSN : 2424-3124
2014
Session ID : 1P2-X02
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1P2-X02 High-sensitive and Wide-range Load Sensor Using Micro Retention Mechanism of Quartz Crystal Resonator(Tactile and Force Sensing (2))
Yuichi MUROZAKIFumihito ARAI
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
Highly sensitive, wide-measurement-range compact load sensors are desirable for various applications. A load sensor using an AT-cut quartz crystal resonator (QCR) has superior characteristics such as, high accuracy, improved strength under compressive stress, long-term stability. However, a retention mechanism is required to firmly support the QCR because the QCR is easily broken by stretching and bending motions. Conventional machining processes are not suitable for further miniaturization of the sensor. Even if the retention mechanism were miniaturized, the assembly process is complicated. In this paper, we propose a novel design and fabrication method for a load sensor using the QCR. Using microfabrication and bonding, the assembly process was simplified. We demonstrate the feasibility of a miniaturized QCR load sensor whose volume is 24.6 mm^3 . Sensitivity of the sensor was 1458 Hz/N. We improved the sensitivity and stability of the sensor; the fluctuation was 0.06 mN over a period of 3 min.
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© 2014 The Japan Society of Mechanical Engineers
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