3P2-N06 MEMS Mechanomyogram Sensor with Acoustic Impedance Matching(Sense, Motion and Measurement (3))

Abstract

We have proposed the high sensitive device that can detect high frequency spectrum of mechanomyogram. The study of high frequency spectrum of mechanomyogram has been superficial because such a sensitive transducer has never been developed. Acoustic impedance matching and a differential pressure sensor are the key to solve this problem. We fabricated two sensors to compare frequency characteristic, one with acoustic impedance matching and the other without it. The result of the experiment was that SN ratio of the sensor with acoustic impedance matching was about up to 700 times larger than that of the sensor without acoustic impedance matching. In addition to this, we were able to measure mechanomyogram using the sensor with acoustic impedance matching and found that up to approximately 1 kHz spectrum of mechanomyogram was detected.