Abstract
We propose a miniature micro motor using the stator that is a cube with a side length of one millimeter. The proposed motor uses a three-wave mode generated at the circumference of its hole, unlike bending vibration modes that is often used in existing micro ultrasonic motors. In this paper, we built an experimental setup and study how to improve of the torque and stability. The motor performance is compared with the analysis based on the Coulomb friction law.
