The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec)
Online ISSN : 2424-3124
2015
Session ID : 1A1-X06
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1A1-X06 Fabrication of graphene cube by nanomanipulation
Takafumi FujiwaraMasahiro NakajimaAkihiko IchikawaKenichi OharaYasuhisa HasegawaToshio Fukuda
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Abstract
This paper presents a fabrication of graphene cubic structure by a nanomanipulation in a FESEM (Field Emission Scanning Electron Microscope). We developed two nanomanipulators with three degrees of freedoms to handle two end-effectors. A cube net was designed and fabricated using a multi graphene by a FIB (Focused Ion Beam) etching. For bending the one side of the cubic net graphene, a tungsten probe was used after reforming by FIB etching to adjust the cube net design. The multi graphene was bent to form a cubic 3D structure in study. Additionally, the bending forces of multi graphene were measured using a silicon cantilever based on the nanomanipulation.
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© 2015 The Japan Society of Mechanical Engineers
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