Abstract
This paper proposes the measurement method for the on-chip cellular mechanical characteristics. In the previous research, we succeeded in the actuation of on-chip kinetic structures at high precision for the characterization of cells. However, there was a serious problem with respect to the sensing accuracy on the observation process. For the detailed and precise characterization of cellular mechanical properties, we need to improve the sensing resolution of probe positions and to identify the precise characteristics of the force sensor. Therefore we employed an effective method to utilize the phase detection of moire fringe. This method realized high resolution displace measurement, hence highly accurate calibration of the force sensor. Finally we succeeded in measuring the detailed mechanical characteristics of cells compared to our previous method.
