Abstract
In this paper, we report the texture quantitative measurement using the miniature multi-axial tactile sensor with microcantilevers which are fabricated by MEMS technology and embedded in the elastomer. The Si microcantilevers are deformed by both normal and shear forces and the deflection of the cantilever can be detected as resistance change of a strain gauge. The resistance changes by active-touching (pushing and sliding) to the object have been characterized and they are correlated with hardness, thickness, and roughness of the object. The first component obtained by principal component analysis of the correlation matrix among the resistance changes shows the surface texture characteristics (roughness, smoothness, friction) of the object. On the other hand, the second principal component shows texture characteristics including both bulky and elastic feelings of the object.
