Abstract
In this study, we propose a novel micro valve usingPluronic^[○!R] F127 as thermally responsive solution. It was hard to integrated conventional micro valves into micro devices because of their complicated composition. Thus, we propose novel micro valve to be integrated with pneumatic micro actuator. The thermally responsive solution valve was designed and fabricated by using micro channel containing thermally responsive solution with micro heater. The micro valve can be reversibly driven by heating and gellirig of thermally responsive solution. Furthermore,we integrated the micro valve topneumatic balloon actuator and successfully controlled its actuation by developed micro valve. Integration of a valve into pneumatic actuator allows designing compact pneumatic actuator system.
