Abstract
This paper describes compensation of magnetic sensor used on an active levitation conveyance system in order to apply magnetic levitation system to non-contact robot hand. The position of the floating object is estimated by using Hall elements. When the magnetic levitation system operates for a long time, the position estimation error occurs. The error arises from the output voltages variations of Hall elements because the temperature of the electromagnet and Hall elements changes. Therefore we reconsider the drive circuit of Hall element. The output voltages of Hall elements are improved. Additionally, the resistance value of Electromagnet changes. Thus, we propose the disturbance observer to estimate the parameter variation as disturbances. As experiments results, we confirmed the estimation error is reduced.