Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : June 05, 2019 - June 08, 2019
In measuring something of living things, it’s important that we measure the natural state. We measure the cells by a micro single-sided transient hot rectangle (μ-STHR) method. The μ-STHR method is a minimally invasive probe applying a high-speed heat pulse. We manufactured the MEMS sensor with biocompatibility and high sensitivity in this method, because the higher the sensitivity of the sensor is, the more opportunity we can discovery the new things in. Therefore, we selected Au as the material of the electrode of the sensor. And, we manufactured the sensor and measured water and cells to check the ability. The results indicated that we succeeded in manufacturing MEMS sensor with biocompatibility and high sensitivity in μ-STHR method.
