Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : May 27, 2020 - May 30, 2020
We controlled a light distribution of scanning light when we give the MEMS scanner drive signal by considering light distribution of the laser spot. MEMS scanner is possible to scan light by changing the angle of the mirror by giving a drive signal. There is, however, a difference between the predicted light distribution of scanning light and the actual light distribution of scanning light, and the control of light distribution was incorrect in the previous research. So we deriving the theoretical model of light distribution by MEMS scanner. And we measure the light distribution of the scanning light when we give the MEMS scanner a drive signal, then we compared measured value and the theoretical model. As the comparison result was in good agreement, it was found that the light distribution can be controlled by the theoretical model. In addition, the effect of the response time of the MEMS scanner to the drive signal on the light intensity distribution of the scanning light was investigated.
