Sensitivity Improvement of MEMS Tactile Sensor by Redesign of Microcantilever

Abstract

In our previous works, MEMS tactile sensor using microcantilevers has for gripping control of a soft object by a robotic hand has been developed, however, improvement of its sensitivity for more precise control has been an critical issue. In this work, significant sensitivity improvement of the tactile sensor has been achieved by redesign of the microcantilever.