Development and evaluation of digital wideband hydrophone using MEMS

Abstract

Most of the conventional hydrophones (underwater microphones) use PZT ceramic as the material, and there are problems such as variation in sensitivity, the necessity of high-magnitude amplification and high cost.

We developed and evaluated a low-cost, easy-to-use MEMS hydrophone that is waterproof and pressure-resistant while maintaining the bandwidth of a commercially available MEMS microphone.