Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : June 01, 2022 - June 04, 2022
This paper presents a design of Si strain sensor to integrate of soft bending microactuator. Bending motion can be detected by integrating a strain sensor into the soft bending microactuator. We focused on Si strain sensor that uses semiconductors with high sensitivity to detect minute movement. However, the allowable strain of Si is small, and the bending motion of the soft actuator may cause Si to break. Therefore, in this study, we proposed a structure in which only the sensing part of the Si strain sensor is made of a thin. In addition, the evaluation results of failure strain showed that flexibility is added by thinning. The result will contribute to the detection of minute forces on delicate objects by soft actuators.
