Abstract
In this study, a system for high-accuracy measurement of surface error properties is developed and investigated. In the system, a photogrammetric measurement system such as a stereo-vision is mounted on a slider and its movement is precisely measured by high accuracy displacement sensors such as laser displacement sensors. Deformations of a target object are measured repeatedly using the photogrammetric measurement at different slider positions. Correction methods of the measurement errors used it the developed system are derived. Some experiments are carried out and the efficiency of the system is demonstrated.
